R-tep™ Particle Detector
Real-time equipment surface particle detector
Free fall of suspended particles or air during clean space operation
Falling particles on the surface adjacent to equipment or products by flow
Real Time Particle Detector for managing foreign substances to be measured.
(Acquired domestic patent, issue in 3 overseas countries)
1
Ultra-small sensor: 80mm x 25mm x 41mm
Particle shape information provided (Image Viewer function)
2
Closest product defect rate management Traceability
Detecting surface foreign material closest to the cause of product defect among existing foreign material measuring devices (detection of particles falling naturally without artificial)
Option : POF (Product Oriented Forecasting) Software
ex) 300mm WF(706), GeluxyS8(92cm2) Reflected Defect Expected Information
offer
3
High Detection Efficiency
Size Classification Processing technology to accurately measure irregular shapes
(Size accuracy more than 90%, Micro Scale certified by Institute of Calibration Technology)
4
Convenient HMI Interface
Freely set the touch screen operation, measurement time, cycle, and number of repetitions (minimum of 5 seconds to 1440 minutes can be set) Automatic recording of foreign material image, automatic recording of number of particles D-base Excel compatible CSV file.
5
Equipment to be measured Interface & Alarm setting function
For each particle size detected, it provides an alarm transmission function and an interlock function connected to the equipment when measuring more than the set value.
(Cleaning, etc., preventive maintenance information notification)
6
Use as a sample for component analysis
Using analysis equipment such as EDX-XRF for accumulated foreign material specimens,
Use as a sample for component analysis
7
Network System
(1) a clean room, (2) a large number of units in an automated production facility that require clean work.
Implementation of real-time particle monitoring management system using R-tep.